Approach to preventing atomic diffusion and preserving electrical conduction using two dimensional crystals and selective atomic layer deposition
AssigneeInternational Business Machines Corporation
InventorsPriscilla D. Antunez, Damon B. Farmer
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Abstract
A method of restricting diffusion of miscible materials across a barrier, including, forming a 2-dimensional material on a substrate surface, wherein the 2-dimensional material includes one or more defects through which a portion of the substrate surface is exposed, forming a plug selectively on the exposed substrate surface, and forming a cover layer on the plug and 2-dimensional material, wherein the cover layer material is miscible in the substrate material.
Claims20
A method of restricting diffusion of miscible materials across a barrier, comprising:
- forming a 2-dimensional material on a substrate surface, wherein the 2-dimensional material includes one or more defects through which a portion of the substrate surface is exposed;
- forming a plug selectively on each of the portions of the substrate surface exposed through each of the one or more defects;
- and
- forming a solid cover layer on the plug and 2-dimensional material, wherein at least a component of the solid cover layer material is miscible in the substrate material.
A method of restricting diffusion of miscible materials across a barrier, comprising:
- forming a 2-dimensional material on a substrate surface, wherein the 2-dimensional material includes one or more defects through which a portion of the substrate surface is exposed, and the 2-dimensional material is graphene, hexagonal boron nitride, or hexagonal molybdenum sulfide;
- forming a plug selectively on each of the portions of the substrate surface exposed through each of the one or more defects, wherein the plug is aluminum oxide, hafnium oxide, or zirconium oxide;
- and
- forming a solid cover layer on the plug and 2-dimensional material, wherein at least a component of the solid cover layer material is miscible with the substrate material.
A 2-dimensional diffusion barrier between two solid miscible materials, comprising:
- a 2-dimensional material on a substrate surface, wherein the 2-dimensional material includes one or more defects through which a portion of the substrate surface is exposed;
- a plug on each of the portions of the substrate exposed through each of the one or more defects;
- and
- a solid cover layer on each of the plugs and the 2-dimensional material, wherein at least a component of the solid cover layer material is miscible in the substrate material, and wherein the 2-dimensional material forms a diffusion barrier between the cover layer and the substrate.
Dependencies are inferred from the claim text.