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US 10,096,568 B2Granted
Die bonding tool and system
AssigneeAsm Technology Singapore Pte Ltd
InventorsKwok Yuen Cheung, Kwok Wah Tong, Jin Hui Meng, Wan Yin Yau, Man Kit Chow
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Abstract
Disclosed is a die bonding tool comprising: a rigid body; and a collet having a die-holding portion; wherein the collet is mechanically coupled to the rigid body by a flexible element which is configured to angularly deflect relative to the rigid body on application of a torque to the collet and/or to a die held by the collet. Also disclosed is a die bonding system comprising the die bonding tool, and an adhesive dispenser for a die bonding system.
Claims17
A die bonding tool comprising:
- a rigid body;
- and
- a collet having a die-holding portion;
- wherein the collet is mechanically coupled to the rigid body by a flexible element which is configured to angularly bend relative to the rigid body on application of a torque to the collet and/or to a die held by the collet.
1 more element
Dependencies are inferred from the claim text.