Carrier and a method for processing a carrier
AssigneeInfineon Technologies Dresden GmbH
InventorSteffen Bieselt
Life of this patent
Estimating the term…
Abstract
According to various embodiments, a carrier may be provided, the carrier including: a hollow chamber spaced apart from a surface of the carrier; a trench structure extending from the surface of the carrier to the hollow chamber and laterally surrounding a first region of the carrier, the trench structure including one or more trenches extending from the surface of the carrier to the hollow chamber, and one or more support structures intersecting the one or more trenches and connecting the first region of the carrier with a second region of the carrier outside the trench structure, wherein the one or more support structures including an electrically insulating material.
Claims9
A method for processing a carrier, the method comprising:
- forming a hollow chamber within the carrier and spaced apart from a surface of the carrier;
- forming a trench structure extending from the surface of the carrier to the hollow chamber and laterally surrounding a first region of the carrier, the trench structure comprising one or more trenches extending from the surface of the carrier to the hollow chamber, and one or more support structures intersecting the one or more trenches and connecting the first region of the carrier with a second region of the carrier outside the trench structure, wherein the one or more support structures comprising an electrically insulating material;
- destroying the one or more support structures;
- and
- removing the first region from the carrier.
A method for processing a carrier, the method comprising:
- forming an opening structure in the carrier, the opening structure comprising one or more openings, each of the one or more openings extending from a surface of the carrier;
- performing an anneal process to form a hollow chamber in the carrier from the opening structure, the hollow chamber spaced apart from the surface of the carrier;
- forming trench structure extending from the surface of the carrier to the hollow chamber and laterally surrounding a first region of the carrier, the trench structure comprising one or more trenches extending from the surface of the carrier to the hollow chamber, and one or more support structures intersecting the one or more trenches and connecting the first region of the carrier with a second region of the carrier outside the trench structure;
- destroying the one or more support structures;
- and
- removing the first region from the carrier.
Dependencies are inferred from the claim text.