US 10,096,505 B2 · Wafer cassette

Abstract

A wafer cassette includes a case, a plurality of wafer trays, and a plurality of transmission mechanisms. The wafer trays are disposed in the case. Each of the wafer trays includes a central opening, a first groove, and a second groove. The diameter of the second groove is greater than that of the first groove. A bottom surface of the second groove is higher than that of the first groove. The first and second grooves surround the central opening. Each of the transmission mechanisms is connected to the corresponding wafer tray to move the wafer tray between a pick-up position and a received position. Since the wafer tray has grooves with different diameters, the wafer tray is capable of receiving wafers with different sizes.

Claims7

Dependent claims

A wafer cassette, comprising:

a plurality of wafer trays, wherein each of the wafer trays comprises a first groove and a second groove surrounding the first groove, wherein a diameter of the second groove is greater than a diameter of the first groove and a bottom surface of the second groove is higher than a bottom surface of the first groove;
a plurality of transmission mechanisms respectively connected to the wafer trays to move the wafer trays between a pick-up position and a received position and
wherein each of the wafer trays further comprises an outer periphery, two hollowed areas, and a central opening, each of the hollowed areas is extending from the central opening to the outer periphery, and the two hollowed areas are opposite to each other.

Dependencies are inferred from the claim text.

Wafer cassette

Life of this patent

Wafer cassette

Life of this patent

Abstract

Claims7