Method for managing atmosphere in storage container

A method for managing an atmosphere in a storage container in a processing apparatus including a substrate transfer region and a container transfer region which are partitioned by a partition wall having a transfer port that is opened/closed by an opening/closing door;

• a load port provided in the container transfer region and configured to place the storage container therein;
• a container keeping rack provided in the container transfer region and configured to temporarily place a storage container configured to hermetically store a plurality of substrates by opening/closing a cover such that the storage container is put on standby;
• and a cover opening/closing mechanism provided in the opening/closing door, and configured to substitute an internal atmosphere of the storage container with an inert gas while removing the cover of the storage container which is in close contact with an inlet edge of the transfer port, the method comprising:
• substituting the internal atmosphere of the storage container that stores non-processed substrates with the inert gas using the cover opening/closing mechanism;
• transferring the storage container of which the internal atmosphere has been substituted with the inert gas, to the container keeping rack and placing and keeping the storage container on the container keeping rack;
• and
• putting the storage container on standby on the container keeping rack while maintaining the atmosphere substituted with the inert gas,
• wherein the inert gas starts to be supplied into a closed space between the cover of the storage container and the opening/closing door of the inlet edge of the transfer port before the cover of the storage container is removed, and continuously supplied after the cover of the storage container is removed.