Substrate liquid processing apparatus, substrate liquid processing method and storage medium
AssigneeTokyo Electron Limited
InventorHideaki Sato
Life of this patent
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Abstract
A substrate liquid processing apparatus includes a liquid processing unit configured to process a substrate by a processing liquid, and a controller. The controller processes the substrate in the liquid processing unit, and switches the processing liquid discharged from a discharge line, from a recycling line, to a waste line in which the processing liquid is discarded through the discharge line to the outside, according to a concentration of an elution component eluted from the substrate.
Claims13
A substrate liquid processing apparatus comprising:
- a liquid processing unit configured to store a processing liquid and a substrate and process the substrate using the processing liquid, the processing liquid including a phosphoric acid aqueous solution;
- a phosphoric acid aqueous solution supply unit configured to supply the phosphoric acid aqueous solution to the liquid processing unit;
- a discharge line connected to the liquid processing unit, and configured to discharge the processing liquid;
- a return line switchably connected to the discharge line, and configured to return the processing liquid to the liquid processing unit;
- a recycling line switchably connected to the discharge line, and including a recycling unit configured to recycle the processing liquid;
- and
- a controller,
- wherein the controller processes the substrate in the liquid processing unit, and switches the processing liquid discharged from the discharge line, from the recycling line, to a waste line in which the processing liquid is discarded through the discharge line to the outside, according to a concentration of an elution component eluted from the substrate.
A method of performing a liquid processing on a substrate, the method comprising:
- processing the substrate using a processing liquid in a liquid processing unit, the processing liquid including a phosphoric acid aqueous solution;
- supplying the phosphoric acid aqueous solution to the liquid processing unit from a phosphoric acid aqueous solution supply unit;
- discharging the processing liquid within the liquid processing unit from a discharge line;
- returning the processing liquid to the liquid processing unit by a return line switchably connected to the discharge line;
- and
- recycling the processing liquid by a recycling line switchably connected to the discharge line and including a recycling unit configured to recycle the processing liquid,
- wherein the controller processes the substrate in the liquid processing unit, and switches the processing liquid discharged from the discharge line, from the recycling line, to a waste line in which the processing liquid is discarded through the discharge line to the outside, according to a concentration of an elution component eluted from the substrate.
A non-transitory computer-readable storage medium storing a program that, when executed, causes a computer to execute a method of performing a liquid processing on a substrate, the method comprising:
- processing the substrate using a processing liquid in a liquid processing unit, the processing liquid including a phosphoric acid aqueous solution;
- supplying the phosphoric acid aqueous solution to the liquid processing unit from a phosphoric acid aqueous solution supply unit;
- discharging the processing liquid within the liquid processing unit from a discharge line;
- returning the processing liquid to the liquid processing unit by a return line switchably connected to the discharge line;
- and
- recycling the processing liquid by a recycling line switchably connected to the discharge line, and including a recycling unit configured to recycle the processing liquid,
- wherein the controller processes the substrate in the liquid processing unit, and switches the processing liquid discharged from the discharge line, from the recycling line, to a waste line in which the processing liquid is discarded through the discharge line to the outside, according to a concentration of an elution component eluted from the substrate.
Dependencies are inferred from the claim text.