Method of improving adhesion
AssigneeSPTS Technologies Limited
InventorsKathrine Crook, Stephen R Burgess, Andrew Price
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Abstract
A method is for improving adhesion between a semiconductor substrate and a dielectric layer. The method includes depositing a silicon dioxide adhesion layer onto the semiconductor substrate by a first plasma enhanced chemical vapor deposition (PECVD) process, and depositing the dielectric layer onto the adhesion layer by a second PECVD process. The first PECVD process is performed in a gaseous atmosphere comprising tetraethyl orthosilicate (TEOS) either in the absence of O2 or with O2 introduced into the process at a flow rate of 250 sccm or less.
Claims17
A method of improving adhesion between a semiconductor substrate and a dielectric layer comprising the steps of:
- depositing a silicon dioxide adhesion layer onto the semiconductor substrate by a first plasma enhanced chemical vapor deposition (PECVD) process;
- and
- depositing the dielectric layer onto the adhesion layer by a second PECVD process;
- in which the first PECVD process is performed in a gaseous atmosphere comprising tetraethyl orthosilicate (TEOS) either in the absence of O2 or with O2 introduced into the process at a flow rate of 250 sccm or less.
Dependencies are inferred from the claim text.