Semiconductor cleaner systems and methods

A system for cleaning a double container carrier workpiece, wherein the double container carrier workpiece comprises a first double container carrier component and a second double container carrier component, wherein the first double container carrier component encloses the second double container carrier component, the system comprising:

• a load port defined by an exterior wall of a housing of the system, the load port configured so that the first double container carrier component and the second double container carrier component, enclosed within the first double container carrier component, of the double container carrier workpiece are received into the housing of the system through the load port as an integral double container carrier workpiece unit;
• a first chamber disposed within the housing, wherein the first chamber has an operable first cleaning interface for interfacing with the first double container carrier component of the double container carrier workpiece, separate from the second double container carrier component of the integral double container carrier workpiece unit such that the second double container carrier component is disparted from the integral double container carrier workpiece unit, and effects cleaning of the first double container carrier component,
• a second chamber disposed within the housing, wherein the second chamber has an operable second cleaning interface for interfacing with the second double container carrier component of the double container carrier workpiece, separate from the first double container carrier component of the integral double container carrier workpiece unit such that the second double container carrier component is disparted from the integral double container carrier workpiece unit, and effects cleaning of interior and exterior surfaces of the second double container carrier component distinct from the cleaning of the first double container carrier component, and
• a first station configured to receive the integral double container carrier workpiece unit from the load port, wherein the first station is coupled to the first and second chambers within the housing, wherein the first station comprises a first robotic mechanism, wherein the first robotic mechanism is configured to dispart the second double container carrier component from an enclosure within the first double container carrier component of the integral double container carrier workpiece unit, and disassemble the second double container carrier component into a first component part and a second component part, wherein the first robotic mechanism is operable to transfer the first double container carrier component from the first station to the first chamber and to transfer the first and second component parts of the second double container carrier component from the first station to the second chamber;
• wherein the first and second chambers effect cleaning of a respective first and second double container carrier component of the integral double container carrier workpiece unit individually in separately isolated atmospheres from each other.