Data processing method, charged particle beam writing method, and charged particle beam writing apparatus

A charged particle beam writing apparatus into which write data is registered, the write data being created by an external apparatus by applying, in a pipeline processing, a plurality of conversion processes to a plurality of pieces of first frame data into which first chip data of design data is divided, the charged particle beam writing apparatus comprising:

• a pre-processing circuitry applying, in a pipeline processing, a plurality of pre-processes to a plurality of pieces of second frame data into which second chip data of the write data is divided, registering the second chip data, and performing, after all of chip data and layout data of the write data are registered, integrity processing including processing that uses the chip data and the layout data;
• and
• a writer writing a pattern onto a substrate with a charged particle beam by using data processed by the pre-processing unit,
• wherein the write data is registered into the charged particle beam writing apparatus on a per-chip basis, on a per-virtual chip basis, or on a per-frame basis, the virtual chip including a plurality of chips combined together.

A charged particle beam writing method using write data, the write data being created by an external apparatus by applying, in a pipeline processing, a plurality of conversion processes to a plurality of pieces of first frame data into which first chip data of design data is divided, the charged particle beam writing method comprising:

• applying, in a pipeline processing, a plurality of pre-processes to a plurality of pieces of second frame data into which second chip data of the write data is divided, and registering the second chip data into a charged particle beam writing apparatus;
• performing, after all of chip data and layout data of the write data are registered, integrity processing including processing that uses the chip data and the layout data;
• and
• writing a pattern onto a substrate with a charged particle beam by using data that has undergone the integrity processing,
• wherein the write data is registered into the charged particle beam writing apparatus on a per-chip basis, on a per-virtual chip basis, or on a per-frame basis, the virtual chip including a plurality of chips combined together.