Control system and method for lithography apparatus
AssigneeMapper Lithography IP B.V.
InventorHerre Tjerk Steenstra
Life of this patent
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Abstract
A method for initializing a first operation in a first module at a first start time value in a first time base, the method comprising generating a clock signal, generating a second time base in the first module based on the clock signal, determining a second sync value in the second time base, determining a first sync value in the first time base corresponding to a second sync value in the second time base, determining a start trigger value in the second time base based on the first sync value and the start time value in the first time base, and initializing the first operation in the first module based on the start trigger value and a current value of the second time base in the first module.
Claims24
A method for initializing a first operation in a first module at a start time value in a first time base, the method comprising:
- generating a clock signal;
- generating a second time base in the first module based on the clock signal;
- determining a second sync value in the second time base;
- determining a first sync value in the first time base corresponding to a second sync value in the second time base;
- determining a start trigger value in the second time base based on the first sync value and the start time value in the first time base;
- and
- initializing the first operation in the first module based on the start trigger value and a current value of the second time base in the first module,
- wherein the second time base is different from the first time base.
A system for initializing a first operation in a first module at a start time value in a first time base, the system comprising:
- a clock for generating a clock signal;
- a count circuit for generating a second time base in the first module based on the clock signal;
- a first circuit for determining a first sync value in the first time base corresponding to a second sync value in the second time base;
- a second circuit for determining a start trigger value in the second time base based on the first sync value and the start time value in the first time base;
- wherein the first module comprises a third circuit for initializing the first operation in the first module based on the start trigger value and a current value of the second time base, and
- wherein the second time base is different from the first time base.
Dependencies are inferred from the claim text.