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US 10,096,416 B2Granted
Magnetizing apparatus and magnetizing method
AssigneeTokyo Electron Limited
InventorsTadashi Enomoto, Makoto Saito
Life of this patent
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Abstract
Disclosed is a magnetizing apparatus including: a placing table configured to place thereon a storage container storing a plurality of substrates; a magnetizing chamber configured to accommodate the storage container and apply a magnetic field to the plurality of substrates in the storage container; and a conveying mechanism configured to convey the storage container from the placing table into the magnetizing chamber.
Claims10
A magnetizing apparatus comprising:
- a placing table fixed in a first region and configured to place thereon a storage container storing a plurality of substrates;
- a magnetizing chamber placed in a second region and configured to accommodate the storage container and to apply a magnetic field to the plurality of substrates in the storage container;
- and
- a conveying mechanism configured to lift the storage container from the placing table and to convey the lifted storage container into the magnetizing chamber.
1 more element
A magnetizing method comprising:
- fixing a placing table in a first region;
- placing a storage container storing a plurality of substrates on a placing table;
- lifting, by a conveying mechanism, the storage container from the placing table;
- conveying the lifted storage container into a magnetizing chamber placed in the second region;
- and
- applying a magnetic field to the plurality of substrates in the storage container conveyed into the magnetizing chamber.
3 more elements
Dependencies are inferred from the claim text.