Inspection device, inspection method, and image processing program
AssigneeToshiba Memory Corporation
InventorMasato Naka
Life of this patent
Estimating the term…
Abstract
An inspection device according to an embodiment includes a microscope, a storage section, an image processing section and an inspection section. The microscope is configured to obtain a primary image by capturing an inspection target. The storage section stores a function defining a relationship between a low-resolution image and a high-resolution image of a calibration sample. The high-resolution image has smaller pixel size than the low-resolution image. The image processing section is configured to generate a secondary image based on the primary image by using the function. The secondary image has smaller pixel size than the primary image. The inspection section is configured to inspect the inspection target using the secondary image.
Claims17
An inspection device comprising:
- a microscope configured to obtain a primary image by capturing an inspection target;
- a storage device storing a function defining a relationship between a low-resolution image and a high-resolution image of a calibration sample, the high-resolution image having smaller pixel resolution than the low-resolution image;
- and
- a processor configured to generate a secondary image based on the primary image by using the function, the secondary image having smaller pixel resolution than the primary image and configured to inspect the inspection target using the secondary image,
- wherein the inspection target is used as the calibration sample.
An inspection device comprising:
- a microscope configured to obtain a primary image by capturing an inspection target;
- a storage device storing in combination each portion of a low-resolution image and each portion of a high-resolution image capturing a same calibration sample, the high-resolution image having smaller pixel resolution than the low-resolution image;
- a processor configured to generate a secondary image having smaller pixel resolution than the primary image by searching the low-resolution image for a portion having high similarity to each portion of the primary image and replacing the each portion of the primary image by a portion of the high-resolution image corresponding to the portion of the low-resolution image having high similarity to the each portion and configured to inspect the inspection target using the secondary image.
An inspection method comprising:
- obtaining a primary image of an inspection target;
- generating a secondary image based on the primary image by using a function generated based on a low-resolution image and a high-resolution image of a calibration sample, the secondary image having smaller pixel resolution than the primary image, the high-resolution image having smaller pixel resolution than the low-resolution image;
- and
- inspecting the inspection target using the secondary image,
- wherein the inspection target is used as the calibration sample.
Dependencies are inferred from the claim text.