Detection apparatus, lithography apparatus, method of manufacturing article, and detection method

A lithography apparatus which forms a pattern on a substrate, the apparatus comprising:

• a stage configured to be movable while holding the substrate;
• a detection apparatus configured to detect a position of a mark on the substrate;
• and
• a controller configured to control, based on the position of the mark detected by the detection apparatus, a position of the stage when the pattern is formed on the substrate,
• wherein the detection apparatus includes:
• an image capturing unit having an image sensor configured to capture an image of the mark;
• and
• a processor configured to control a first image capturing and a second image capturing which cause the image capturing unit to capture images of the mark on the substrate, the second image capturing being performed after the first image capturing, and determine the position of the mark based on an image obtained by the second image capturing,
• wherein the processor controls the first image capturing such that an output value of the image sensor becomes a first target value which is smaller than a second target value to be used in the second image capturing, and determines an image capturing condition for controlling the second image capturing such that an output value of the image sensor becomes the second target value, based on an image capturing condition used in the first image capturing, and
• wherein the processor starts the second image capturing at timing when a vibration of the stage falls within an allowable range, and controls the first image capturing such that the image capturing condition for controlling the second image capturing is determined by the timing.

A method of manufacturing an article, the method comprising:

• forming a pattern on a substrate using a lithography apparatus;
• and
• processing the substrate, on which the pattern has been formed, to manufacture the article,
• wherein the lithography apparatus forms the pattern on the substrate, and includes:
• a stage configured to be movable while holding the substrate;
• a detection apparatus configured to detect a position of a mark on the substrate;
• and
• a controller configured to control, based on the position of the mark detected by the detection apparatus, a position of the stage when the pattern is formed on the substrate,
• wherein the detection apparatus includes:
• an image capturing unit having an image sensor configured to capture an image of the mark;
• and
• a processor configured to control a first image capturing and a second image capturing which cause the image capturing unit to capture images of the mark on the substrate, the second image capturing being performed after the first image capturing, and determine the position of the mark based on an image obtained by the second image capturing,
• wherein the processor controls the first image capturing such that an output value of the image sensor becomes a first target value which is smaller than a second target value to be used in the second image capturing, and determines an image capturing condition for controlling the second image capturing such that an output value of the image sensor becomes the second target value, based on an image capturing condition used in the first image capturing, and
• wherein the processor starts the second image capturing at timing when a vibration of the stage falls within an allowable range, and controls the first image capturing such that the image capturing condition for controlling the second image capturing is determined by the timing.

A detection method of detecting a position of a mark on a substrate held by a stage which is configured to be movable while holding the substrate, the method comprising:

• performing a first image capturing which causes an image sensor to capture an image of the mark;
• performing a second image capturing which causes the image sensor to capture an image of the mark, after the performing the first image capturing;
• and
• determining the position of the mark based on the image obtained in the second image capturing,
• wherein the first image capturing is controlled such that an output value of the image sensor becomes a first target value which is smaller than a second target value to be used in the second image capturing, and an image capturing condition for controlling the second image capturing is determined such that an output value of the image sensor becomes the second target value, based on an image capturing condition used in the first image capturing, and
• wherein the second image capturing is started at timing when a vibration of the stage falls within an allowable range, and the first image capturing is controlled such that the image capturing condition for controlling the second image capturing is determined by the timing.

A detection apparatus which detects a position of a mark on a substrate, the apparatus comprising:

• an image capturing unit having an image sensor configured to capture an image of the mark;
• and
• a processor configured to control a first image capturing and a second image capturing which cause the image capturing unit to capture images of the mark on the substrate, the second image capturing being performed after the first image capturing and determine the position of the mark based on an image obtained by the second image capturing,
• wherein the processor controls the first image capturing in a state of setting an output gain of the image sensor to a first target gain which is higher than a second target gain to be used in the second image capturing, and determines an image capturing condition for controlling the second image capturing in a state of setting an output gain of the image sensor to the second gain, based on an image capturing condition used in the first image capturing.

A detection apparatus which detects a position of a mark on a substrate, the apparatus comprising:

• an image capturing unit having an image sensor configured to capture an image of the mark;
• and
• a processor configured to control a first image capturing and a second image capturing which cause the image capturing unit to capture images of the mark, the second image capturing being performed after the first image capturing, and determine the position of the mark based on an image obtained by the second image capturing,
• wherein the processor controls the first image capturing such that an output value of the image sensor becomes a first target value which is smaller than a second target value to be used in the second image capturing, and determines an image capturing condition for controlling the second image capturing such that an output value of the image sensor becomes the second target value, based on an image capturing condition used in the first image capturing, and
• wherein the processor controls the second image capturing at a same magnification as a magnification at which the processor controls the first image capturing.