Vibration-compensated optical system, lithography apparatus and method
AssigneeCarl Zeiss SMT GmbH
InventorsYim-Bun Patrick Kwan, Tim Groothuijsen
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Abstract
A vibration-compensated optical system for a lithography apparatus includes an optical element, a carrying element, an actuator for actuating the optical element relative to the carrying element, a first elastic element which directly couples the optical element to the carrying element, a reaction mass, and a second elastic element. The actuator couples the optical element to the reaction mass. The second elastic element directly couples the reaction mass to the carrying element. For a mass (m1) of the optical element, a stiffness (k1) of the first elastic element, a mass (m2) of the reaction mass and a stiffness (k2) of the second elastic element the following holds true: m 1 m 2 = k 1 k 2 .
Claims20
A system, comprising:
- an optical element;
- a carrying element;
- an actuator configured to actuate the optical element relative to the carrying element;
- a first elastic element directly coupling the optical element to the carrying element;
- a reaction mass coupled to the optical element via the actuator;
- and
- a second elastic element directly coupling the reaction mass to the carrying element, wherein:
- m1 is a mass of the optical element, k1 is a stiffness of the first elastic element;
- m2 is a mass of the reaction mass;
- k2 is a stiffness of the second elastic element;
- the system further comprises:
- a first damping element coupling the optical element to the carrying element;
- and
- a second damping element coupling the reaction mass to the carrying element
- the first damping element has a damping (c1);
- the second damping element has a damping (c2);
- and
- m
- 1
- m
- 2
- =
- k
- 1
- k
- 2
- =
- c
- 1
- c
- 2
- .
A system, comprising:
- an optical element;
- a carrying element;
- an actuator configured to actuate the optical element relative to the carrying element;
- a first elastic element directly coupling the optical element to the carrying element;
- a reaction mass coupled to the optical element via the actuator;
- and
- a second elastic element directly coupling the reaction mass to the carrying element,
- wherein the system is configured so that, when the actuator actuates the optical element relative to the carrying element, a force on the carrying element resulting from the actuation is zero,
- wherein the system further comprises:
- a first damping element coupling the optical element to the carrying element;
- and
- a second damping element coupling the reaction mass to the carrying element, and
- wherein the system is configured so that a mass of the optical element, a stiffness of the first elastic element, a damping of the first damping element, a mass of the reaction mass, a stiffness of the second elastic element, and a damping of the second damping element are such that, when the actuator actuates the optical element relative to the carrying element, a force on the carrying element resulting from the actuation is zero.
Dependencies are inferred from the claim text.