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US 10,095,109 B1Granted
Acid-cleavable monomer and polymers including the same
AssigneeRohm and Haas Electronic Materials LLC
InventorsEmad Aqad, James W. Thackeray
Life of this patent
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Abstract
A monomer having formula (I): wherein in formula (I), groups and variables are the same as described in the specification.
Claims20
A monomer having formula (I):
- wherein in formula (I):
- Ra is H, F, —CN, C1-10 alkyl group, or C1-10 fluoroalkyl group;
- R1 and R2 are different and each chosen from an unsubstituted or substituted C1-10 linear or branched alkyl group, an unsubstituted or substituted C3-10 cycloalkyl group, an unsubstituted or substituted C3-10 alkenylalkyl group, an unsubstituted or substituted C3-10 alkynylalkyl group, or an unsubstituted or substituted C6-30 aryl group, wherein R1 and R2 optionally comprise at least one linking group selected from O and S, and wherein R1 and R2 together optionally form a ring;
- represents a monocyclic or polycyclic unsubstituted or substituted C6-30 arylene group or a monocyclic or polycyclic unsubstituted or substituted C3-30 heteroarylene group, wherein “*” and “*′” indicate a point of attachment to a neighboring group or atom;
- “I” represents iodine;
- and
- n is 1, 2, 3, 4, 5, 6, 7, 8, and 9.
4 more elements
A photoresist composition comprising:
- a copolymer comprising a polymerized product of a monomer having formula (I):
- wherein in formula (I):
- Ra is H, F, —CN, C1-10 alkyl group, or C1-10 fluoroalkyl group;
- R1 and R2 are each independently an unsubstituted or substituted C1-10 linear or branched alkyl group, an unsubstituted or substituted C3-10 cycloalkyl group, an unsubstituted or substituted C3-10 alkenylalkyl group, an unsubstituted or substituted C3-10 alkynylalkyl group, or an unsubstituted or substituted C6-30 aryl group, wherein R1 and R2 optionally comprise at least one linking group selected from O and S, and wherein R1 and R2 together optionally form a ring;
- represents a monocyclic or polycyclic unsubstituted or substituted C6-30 arylene group or a monocyclic or polycyclic unsubstituted or substituted C3-30 heteroarylene group, wherein “*” and “*′” indicate a point of attachment to a neighboring group or atom;
- “I” represents iodine;
- and
- n is 1, 2, 3, 4, 5, 6, 7, 8, and 9;
- a photoacid generator having formula G+A−, wherein G+ has formula (VI):
- and A− is a non-polymerizable organic anion;
- and a solvent.
8 more elements
Dependencies are inferred from the claim text.