Photosensitive composition and pattern formation method
AssigneeEvolving nano process infrastructure Development Center, Inc.
InventorsMinoru Toriumi, Toshiro Itani
Life of this patent
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Abstract
According to one embodiment, a photosensitive composition includes a great number of photosensitive core-shell type nano-particles each including a core and a shell and having a structure that the core is metal oxide particle and covered by the shell. The shell includes a) unsaturated carboxylic acid or unsaturated carboxylate, which is a negatively ionized unsaturated carboxylic acid, and b) silylated unsaturated carboxylic acid or unsaturated carboxylate which is negatively ionized silylated unsaturated carboxylic acid.
Claims9
A photosensitive composition comprising:
- a great number of photosensitive core-shell type nano-particles each including a core and a shell and having a structure that the core is metal oxide particle and covered by the shell, wherein
- the shell includes:
- a component a) an unsaturated carboxylic acid or an unsaturated carboxylate, which is a negatively ionized unsaturated carboxylic acid;
- and a component b) a silylated unsaturated carboxylic acid or an unsaturated carboxylate which is a negatively ionized silylated unsaturated carboxylic acid, and
- the component b) is bound to the surface of the core.
A pattern formation method comprising:
- providing a solution of a photosensitive composition comprising a great number of photosensitive core-shell type nano-particles each including a core and a shell and having a structure that the core is covered by the shell;
- applying the solution of the photosensitive composition on a substrate to be processed;
- forming a photosensitive composition film on the substrate to be processed by heat treatment;
- exposing the photosensitive composition film by selectively irradiating with extreme ultraviolet rays;
- and
- developing the film exposed using a developer, wherein
- the core is an oxide of a metal selected from the group consisting of Ti, Zr and Hf,
- the shell includes:
- a component a) an unsaturated carboxylic acid or an unsaturated carboxylate, which is a negatively ionized unsaturated carboxylic acid;
- and a component b) a silylated unsaturated carboxylic acid or an unsaturated carboxylate which is a negatively ionized silylated unsaturated carboxylic acid, and
- the component b) is bound to the surface of the core.
Dependencies are inferred from the claim text.