Solid-state laser system and excimer laser system

A solid-state laser system, comprising:

• a solid-state laser unit configured to output first pulsed laser light with a first wavelength and second pulsed laser light with a second wavelength;
• a single solid-state amplifier configured to receive the first pulsed laser light and the second pulsed laser light, and output third pulsed laser light with the first wavelength and fourth pulsed laser light with the second wavelength;
• an optical device provided downstream of the single solid-state amplifier, and configured to branch the third pulsed laser light and the fourth pulsed laser light;
• a wavelength converter configured to receive the third pulsed laser light branched by the optical device, and output harmonic light with a third wavelength;
• a Raman laser unit configured to receive the fourth pulsed laser light branched by the optical device, and output Stokes light with a fourth wavelength;
• and
• a wavelength conversion system configured to receive the harmonic light and the Stokes light, and output fifth pulsed laser light with a fifth wavelength converted in wavelength from the third wavelength and the fourth wavelength.

An excimer laser system, comprising:

• a solid-state laser unit configured to output first pulsed laser light with a first wavelength and second pulsed laser light with a second wavelength;
• a first solid-state amplifier configured to receive the first pulsed laser light, and output third pulsed laser light with the first wavelength;
• a wavelength converter configured to receive the third pulsed laser light, and output harmonic light with a third wavelength;
• a second solid-state amplifier configured to receive the second pulsed laser light, and output fourth pulsed laser light with the second wavelength;
• a Raman laser unit configured to receive the fourth pulsed laser light, and output Stokes light with a fourth wavelength;
• a wavelength conversion system configured to receive the harmonic light and the Stokes light, and output fifth pulsed laser light with a fifth wavelength converted in wavelength from the third wavelength and the fourth wavelength;
• and
• an excimer laser amplifier configured to receive the fifth pulsed laser light, and output pulsed laser light with the fifth wavelength.

An excimer laser system, comprising:

• a solid-state laser unit configured to output first pulsed laser light with a first wavelength and second pulsed laser light with a second wavelength;
• a single solid-state amplifier configured to receive the first pulsed laser light and the second pulsed laser light, and output third pulsed laser light with the first wavelength and fourth pulsed laser light with the second wavelength;
• an optical device provided downstream of the single solid-state amplifier, and configured to branch the third pulsed laser light and the fourth pulsed laser light;
• a wavelength converter configured to receive the third pulsed laser light branched by the optical device, and output harmonic light with a third wavelength;
• a Raman laser unit configured to receive the fourth pulsed laser light branched by the optical device, and output Stokes light with a fourth wavelength;
• a wavelength conversion system configured to receive the harmonic light and the Stokes light, and output fifth pulsed laser light with a fifth wavelength converted in wavelength from the third wavelength and the fourth wavelength;
• and
• an excimer laser amplifier configured to receive the fifth pulsed laser light, and output pulsed laser light with the fifth wavelength.