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US 10,094,961 B2Granted
Optical layer system
AssigneeDr. Johannes Heidenhain GmbH
InventorsPeter Speckbacher, Stefan Funk, Christian Baeuml
Life of this patent
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Abstract
An optical layer system for a position-measuring device includes at least first, second and third functional surfaces disposed on a surface of a transparent substrate. Each of the functional surfaces have a different optical function. The functional surfaces are composed of a first layer stack and a second layer stack.
Claims20
An optical layer system for a position-measuring device, comprising:
- at least first, second and third functional surfaces disposed on a surface of a transparent substrate, each of the functional surfaces having a different optical function, wherein the functional surfaces are composed of a first layer stack and a second layer stack,
- wherein the first functional surface is formed by the first layer stack and acts as an antireflection coating, and the third functional surface is formed by the second layer stack and acts as a mirror, and
- wherein the second functional surface is formed by the first and second layer stacks being alternately arranged with respect to each other at intervals of less than 1 mm so as to act as an optical grating.
An optical layer system for a position-measuring device, comprising:
- at least first, second and third functional surfaces disposed on a surface of a transparent substrate, each of the functional surfaces having a different optical function, wherein the functional surfaces are composed of a first layer stack and/or a second layer stack,
- wherein the second functional surface is formed by the first and second layer stacks being alternately arranged with respect to each other at intervals of less than 1 mm so as to act as an optical grating.
Dependencies are inferred from the claim text.