Optical field enhancement device and manufacturing method of the same
AssigneeFUJIFILM Corporation
InventorShogo Yamazoe
Life of this patent
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Abstract
In an optical field enhancement device in which localized plasmon is induced on a surface through illumination of excitation light and intensity of signal light emitted, by the illumination, from a sample placed on the surface is enhanced, forming sharp-edged petal-like fine uneven structures disposed at random on a substrate, and forming plate-like metal fine structures on tip portions of the sharp-edged petal-like fine uneven structures by depositing a metal from an oblique direction with respect to a direction perpendicular to a plane of the substrate on which the sharp-edged petal-like fine uneven structures are formed.
Claims12
An optical field enhancement device in which localized plasmon is induced on a surface through illumination of excitation light and intensity of signal light emitted, by the illumination, from a sample placed on the surface is enhanced, the device comprising:
- sharp-edged fine uneven structures disposed at random on a substrate;
- and
- metal flakes formed on tip portions of the sharp-edged fine uneven structures;
- the sharp-edged fine uneven structure being a structure in which the cross sectional area of a plane parallel to the substrate surface decreases as the distance from the substrate surface increases.
A manufacturing method of an optical field enhancement device in which localized plasmon is induced on a surface through illumination of excitation light and intensity of signal light emitted, by the illumination, from a sample placed on the surface is enhanced, the method comprising the steps of:
- forming sharp-edged fine uneven structures disposed at random on a substrate;
- and
- forming metal flakes on tip portions of the sharp-edged fine uneven structures by depositing a metal from an oblique direction with respect to a direction perpendicular to a plane of the substrate on which the sharp-edged fine uneven structures are formed;
- the sharp-edged fine uneven structure being a structure in which the cross sectional area of a plane parallel to the substrate surface decreases as the distance from the substrate increases.
Dependencies are inferred from the claim text.