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US 10,094,938 B2Granted
Scintillator plate and radiation detector including the same
AssigneeCanon Kabushiki Kaisha
InventorsTetsunori Ojima, Minoru Watanabe
Life of this patent
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Abstract
A protection film, configured to cover scintillators formed on a scintillator substrate, the scintillators being a plurality of columnar crystal structures protruding from a surface of the scintillator substrate, at least includes a metal alkoxide, and a cross-link formed by cross-linking some of metal atoms of the metal alkoxide by oxygen.
Claims9
A scintillator plate comprising:
- a scintillator substrate;
- scintillators formed on the scintillator substrate, the scintillators being a plurality of columnar crystal structures protruding from a surface of the scintillator substrate;
- and
- a protection film configured to cover the scintillators,
- wherein the protection film at least includes a metal alkoxide, and a cross-link formed by cross-linking some of metal atoms of the metal alkoxide by oxygen.
2 more elements
Dependencies are inferred from the claim text.