Measurement chamber for a compact goniometer in an x-ray spectrometer

A measurement chamber (2) of an x-ray spectrometer (1) comprising a goniometer (3) for analyzing x-ray fluorescence radiation emanating from a measuring sample (4) to be examined that is irradiated by x-ray radiation, comprising

• an entrance opening for the entry of x-ray fluorescence radiation into the measurement chamber (2),
• a first goniometer arm (5) for holding and adjusting an analyzer crystal (5a), and
• a second goniometer arm (6) for holding and adjusting an x-ray detector (6a, 6b),
• wherein the measurement chamber (2) has a vacuum-tight configuration and wherein the entrance opening for the x-ray fluorescence radiation is sealed in a vacuum-tight manner by way of a window (7),
• wherein the measurement chamber (2) contains a bearing block (8) for receiving and holding both goniometer arms (5, 6) in a concentric and rotatable manner, and respectively one drive plate (9′, 9″) per goniometer arm (5, 6), said drive plates being movable relative to the bearing block (8), wherein the goniometer arms (5, 6) are each mechanically adjustable by means of a piezo-motor (15, 16), which is securely connected to the bearing block (8) or a drive plate (9′, 9″) of the respective goniometer arm (5, 6), and
• wherein the measurement chamber (2) contains all mechanical components of the goniometer (3).