Optical measurement device and optical measurement method

An optical measurement method for irradiating a sample with excitation light and detecting measurement light, the optical measurement method comprising:

• irradiating a first light absorbing member, which is disposed in a light integrator, with the excitation light having a predetermined beam cross-section and detecting first measurement light, which is output from the light integrator, to acquire first corrective intensity data;
• irradiating a second light absorbing member, which is disposed in the light integrator, with the excitation light having the predetermined beam cross-section and detecting second measurement light, which is output from the light integrator, to acquire second corrective intensity data;
• irradiating the sample, which is disposed in the light integrator, with the excitation light having the predetermined beam cross-section and detecting measurement light, which is output from the light integrator, to acquire intensity data at one or a plurality of wavelengths;
• calculating correction data based on the first corrective intensity data and the second corrective intensity data;
• and
• calculating optical characteristics of the sample based on the intensity data and the correction data,
• wherein the predetermined beam cross-section of the excitation light is covered with the first light absorbing member and covers the second light absorbing member.

An optical measurement device for irradiating a sample with excitation light and detecting measurement light, the optical measurement device comprising:

• a light integrator in which the sample is disposed;
• an optical system configured to irradiate the sample in the light integrator with the excitation light having a predetermined beam cross-section;
• a photodetector configured to detect measurement light output from the light integrator and output intensity data at one or a plurality of wavelengths;
• a storage in which correction data is stored;
• and
• a computer configured to calculate optical characteristics of the sample based on the intensity data and the correction data,
• wherein the correction data is a correction value calculated based on first corrective intensity data, which is a detection value of first measurement light output from the light integrator when a first light absorbing member disposed in the light integrator is irradiated with the excitation light having the predetermined beam cross-section, and second corrective intensity data, which is a detection value of second measurement light output from the light integrator when a second light absorbing member disposed in the light integrator is irradiated with the excitation light having the predetermined beam cross-section, and
• the area of the predetermined beam cross-section of the excitation light is smaller than the area of the first light absorbing member and larger than the area of the second light absorbing member.

An optical measurement method for irradiating a sample with excitation light and detecting measurement light, the optical measurement method comprising:

• irradiating a first light absorbing member, which is disposed in a light integrator, with the excitation light having a predetermined beam cross-section and detecting first measurement light, which is output from the light integrator, to acquire first corrective intensity data;
• irradiating a second light absorbing member, which is disposed in the light integrator, with the excitation light having the predetermined beam cross-section and detecting second measurement light, which is output from the light integrator, to acquire second corrective intensity data;
• irradiating the sample, which is disposed in the light integrator, with the excitation light having the predetermined beam cross-section and detecting measurement light that is output from the light integrator acquiring intensity data at one or a plurality of wavelengths;
• calculating correction data based on the first corrective intensity data and the second corrective intensity data;
• and
• calculating optical characteristics of the sample based on the intensity data and the correction data,
• wherein the area of the predetermined beam cross-section of the excitation light is smaller than the area of the first light absorbing member and larger than the area of the second light absorbing member.