Scattering measurement system and method

A scattering measurement system, comprising:

• a light source generator configured to generate a detection light beam with discontinuous multi-wavelengths, and generate, when the detection light beam is incident on an object, a multi-order diffraction light beam with three-dimensional feature information, wherein the detection light beam is a High-order Harmonic Generation (HHG) extreme ultraviolet light beam with discontinuous multi-wavelengths;
• a filter configured to filter out 0th-order signals from the multi-order diffraction light beam, with the other order light remained;
• a detector having a photosensitive array, and configured to receive the multi-order diffraction light beam at a time and convert the multi-order diffraction light beam into multi-order diffraction signals with the three-dimensional feature information;
• and
• a processor configured to receive the multi-order diffraction signals, and compare the multi-order diffraction signals with multi-order diffraction feature patterns in a database and analyze the three-dimensional feature information of the object, wherein the multi-order diffraction feature patterns in the database are multi-order diffraction feature patterns with at least one of multi-wavelengths established based on a rigorous coupled-wave theory,
• wherein a size and a profile of the object are measured according to a plurality of the multi-order diffraction light beams without zero-order light beams.