Production method for a detection apparatus and detection apparatuses

A detection apparatus, comprising:

• a semiconductor substrate having at least one sensitive region formed on and/or in the semiconductor substrate, wherein the semiconductor substrate is at least partly encapsulated by at least one encapsulation material, and/or at least one encapsulation structure, wherein at least one sensing area of the at least one sensitive region is exposed by at least one of an air access, a liquid access and a particle access which extends in each case from an external environment of the at least partly encapsulated semiconductor substrate at least partly through the at least one encapsulation material and/or the at least one encapsulation structure to the at least one sensing area, and wherein at least one sensor signal of the at least one sensitive region varies for a change in at least one physical variable and/or at least one chemical concentration of at least one substance to be detected at the sensing area of the respective sensitive region;
• and
• an evaluation device having a memory, wherein the evaluation device is configured, taking account of at least the at least one sensor signal and an evaluation relation stored on the memory, to define and output information regarding the at least one physical variable and/or the at least one substance to be detected;
• wherein the evaluation relation includes at least one first test and/or calibration signal which is determined in the case of an air-, liquid- and/or particle-tight sealing of the at least one sensing area of the at least partly encapsulated semiconductor substrate from the external environment as the at least one sensor signal.

A detection apparatus, comprising:

• a semiconductor substrate having at least one sensitive region formed on and/or in the semiconductor substrate, wherein the semiconductor substrate is at least partly encapsulated by at least one encapsulation material and/or at least one encapsulation structure, wherein at least one sensing area of the at least one sensitive region is exposed by at least one of an air access, a liquid access and a particle access which extends in each case from an external environment of the at least partly encapsulated semiconductor substrate at least partly through the at least one encapsulation material and/or the at least one encapsulation structure to the at least one sensing area, and wherein at least one sensor signal of the at least one sensitive region varies for a change in at least one physical variable and/or at least one chemical concentration of at least one substance to be detected at the sensing area of the respective sensitive region;
• and
• an amplifier device having a memory, wherein the amplifier device is configured, taking account of at least the at least one sensor signal and an amplification relation stored on the memory, to output an amplified signal;
• wherein the amplification relation includes at least one first test and/or calibration signal which is determined in the case of an air-, liquid- and/or particle-tight sealing of the at least one sensing area of the at least partly encapsulated semiconductor substrate from the external environment as the at least one sensor signal.