Flow sensor arrangement

Flow sensor arrangement for determining the flow of a fluid, comprising a substrate, and arranged therein or thereon:

• —a heater, —at least one first thermocouple for generating a first signal proportional to a temperature difference between a location downstream from the heater and a first reference location, at least one second thermocouple for generating a second signal proportional to a temperature difference between a location upstream from the heater and a second reference location which second reference location is different from the first reference location, —at least one third thermocouple for generating a third signal proportional to a temperature difference between the first reference location and the second reference location, a processor for determining a sensing signal indicative of the flow of the fluid over the heater and the first and the second thermocouple dependent on the first signal, the second signal and the third signal, wherein the substrate comprises a measuring region and a regular region, wherein a thermal conductance in the measuring region is lower than a thermal conductance in the regular region, and wherein the heater, the downstream location and the upstream location are arranged in the measuring region while the first reference location and the second reference location are arranged in the regular region.