Chromatic confocal sensor and measurement method
AssigneeMitutoyo Corporation
InventorsNorihiko Masuda, Koji Kubo
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AssigneeMitutoyo Corporation
InventorsNorihiko Masuda, Koji Kubo
Estimating the term…
Provided is a chromatic confocal sensor including: a first light source that emits measurement light including a plurality of light beams having different wavelengths; a second light source that emits a visible light beam having a predetermined wavelength; an optical head that causes incident light to be converged at a focal position corresponding to a wavelength of the incident light and outputs reflection light reflected by an object to be measured at the focal position; a position calculation section that calculates a position of the object to be measured on the basis of the reflection light output by the optical head; and a switching section that selectively switches between a first operation in which only the measurement light enters the optical head and a second operation in which at least the visible light beam enters the optical head.
A chromatic confocal sensor, comprising:
A measurement method, comprising:
Dependencies are inferred from the claim text.