Substrate processing apparatus and method of fabricating substrate loading unit

A substrate processing apparatus comprising:

• a process chamber in which etching by a supplied corrosive gas can be performed to remove a film formed therein after a film formation process;
• a susceptor disposed in the process chamber and having a substrate loading portion on which a substrate can be loaded on an upper surface of the susceptor, the corrosive gas being supplied to the susceptor from above the upper surface of the susceptor;
• a shaft passing through the susceptor;
• a first securing member having a flat shape and configured to secure the susceptor at an upper surface side with the shaft inserted into the first securing member, the first securing member being in contact with the susceptor;
• a second securing member having a flat shape and configured to secure the susceptor at a lower surface side with the shaft inserted into the second securing member, the second securing member being in contact with the susceptor;
• a pressing member disposed below the susceptor to urge the shaft in a downward direction while urging the second securing member in an upward direction, thereby securing the susceptor at the lower surface side through the second securing member, an upper end of the pressing member being in contact with the second securing member and a lower end of the pressing member being in contact with a lower end of the shaft;
• and
• a stopping member formed above the susceptor and engaged with the shaft to urge the first securing member in cooperation with the pressing member, thereby securing the susceptor at the upper surface side through the first securing member,
• wherein the shaft has a constricted portion formed below an upper end of the shaft and having a smaller diameter than the upper end of the shaft, the stopping member being engaged with the constricted portion to stop a downward movement of the shaft, and
• wherein the susceptor, the first securing member and the stopping member are made of a material having corrosion resistance against the corrosive gas higher than the pressing member.