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US 10,094,020 B2Granted
Method of producing a thin metal-organic framework film using vapor phase precursors
AssigneesImec Vzw, Katholieke Universiteit Leuven, KU LEUVEN R&D
InventorsIvo Stassen, Rob Ameloot, Dirk De Vos, Philippe M. Vereecken
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Abstract
A method of producing a metal-organic framework (MOF) film on a substrate is disclosed, the method comprising providing a substrate having a main surface and forming on said main surface a MOF film using an organometallic compound precursor and at least one organic ligand, wherein each of said organometallic compound precursor and said at least one organic ligand is provided only in vapour phase.
Claims19
A method of producing a metal organic framework (MOF) film on a substrate, the method comprising:
- providing a substrate having a main surface;
- and
- forming on said main surface a MOF film using an organometallic compound precursor, selected to form an organometallic compound, and at least one organic ligand,
- wherein each of said organometallic compound precursor and said at least one organic ligand is provided in vapor phase.
1 more element
Dependencies are inferred from the claim text.