Modular tubular susceptor

A susceptor for delimiting process space in protective gas and vacuum process installations, said susceptor is made from graphite, and closable at each of two opposite ends by a cover, the susceptor comprising a plurality of modules which are lined up with one another longitudinally into a continuous tunnel and which are connected to one another positively and nonpositively, wherein each module is composed of two components, said two components being a tubular portion and a baseplate screwed thereto,

• wherein a first module and a second module are adjacent having profiled end faces where the first module has a first end face abutting a second end face of the second module said first module and second module have a positive connection where the end face of the first module has the negative shape of the end face of the second module;
• wherein the baseplate of each adjacent module is provided with depressions which pass over from the first module to the second module and a connector engages flush into each depression between adjacent modules to connect the first module and the second module, wherein the connector is a double-T tongue-and-groove connector having a semicircular cross-section, said connector is a pin made of graphite and said pin has a flat upper surface and an outer lower surface engaging the depression between adjacent modules and said outer lower surface having a per portion with a semi-circular shape, and wherein all of the components of each module are cut from a same blank of graphite.