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US 10,094,015 B2Granted
Protective layer for a magnetic recording medium, and a method of manufacturing the same
AssigneeFuji Electric (Malaysia) Sdn, Bhd.
InventorsWah Lawrence Ng, Se Yong Eh Noum, Mun Sing Fan, Wee Shen Khoo, Naruhisa Nagata
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Abstract
A method for making a magnetic recording medium, including providing a substrate, forming a magnetic layer on the substrate, applying filtered cathodic vacuum arc (FCVA) deposition to form a film on the magnetic layer, and performing nitridation on the film formed by the FCVA deposition.
Claims12
A method for making a magnetic recording medium, comprising:
- providing a substrate;
- forming a magnetic layer on the substrate in a first chamber;
- moving the substrate having the magnetic layer formed thereon to a second chamber that is different from the first chamber;
- and
- applying, in the second chamber, filtered cathodic vacuum arc (FCVA) deposition to form a tetrahedral amorphous carbon film on the magnetic layer;
- moving the substrate that has the magnetic layer with the tetrahedral amorphous carbon film formed thereon to a third chamber that is different from the first and second chambers;
- and
- performing nitridation in the third chamber by treating the tetrahedral amorphous carbon film, formed in the second chamber by the FCVA deposition, with nitrogen atoms, to thereby form a nitridated carbon protective layer that has a nitrogen concentration of 15%˜17% at an outmost surface thereof.
5 more elements
A method for forming a protective layer of a magnetic recording medium, the magnetic recording medium having a magnetic layer, the method comprising:
- applying, in a chamber, filtered cathodic vacuum arc (FCVA) deposition to form a tetrahedral amorphous carbon film on the magnetic layer;
- moving the magnetic recording medium of which the magnetic layer has the tetrahedral amorphous carbon film formed thereon to another chamber, which is different from the chamber in which the FCVA deposition is applied;
- and
- performing nitridation in said another chamber by treating the tetrahedral amorphous carbon film, formed by the FCVA deposition, with nitrogen atoms, to thereby form the protective layer that is a nitridated carbon protective layer having a nitrogen concentration of 15%˜17% at an outmost surface thereof.
1 more element
Dependencies are inferred from the claim text.