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US 10,093,815 B2Granted
Surface treatment agent and surface treatment method
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsDaijiro Mori, Akira Kumazawa
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Abstract
A surface treatment agent capable of effectively preventing pattern collapse of an inorganic pattern or a resin pattern provided on a substrate, and a surface treatment method using such a surface treatment agent. The surface treatment agent includes a silylation agent and a nitrogen-containing heterocyclic compound which does not include a silicon atom.
Claims5
A surface treatment agent used in surface treatment of a treatment target, comprising:
- a silylation agent selected from the group consisting of
- 2,2,5,5-tetramethyl-2,5-disila-1-aza-cyclopentane and 2,2,4,4,6,6-hexamethylcyclotrisilazane;
- and
- a nitrogen-containing heterocyclic compound which does not include a silicon atom,
- said nitrogen-containing heterocyclic compound comprising (A) a nitrogen-containing five-membered ring or (B) a condensed polycyclic including a nitrogen-containing five-membered ring skeleteon, wherein the nitrogen-containing heterocyclic compound has an aromatic property;
- and
- at least one solvent selected from the group consisting of a dialkyl glycol ether, a (poly)alkylene glycol monoalkyl ether, a (poly)alkylene glycol monoalkyl ether acetate and a lactone.
4 more elements
Dependencies are inferred from the claim text.