Metal N-aminoguanidinate complexes for use in thin film fabrication and catalysis
AssigneeUmicore AG & Co. KG
InventorsJoerg Sundermeyer, Katrin Schlechter
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Abstract
The present patent application relates to new metal complexes having at least one N-aminoguanidinate ligand. The patent application further relates to the preparation of the new metal complexes and also to their use. The new metal complexes are especially suitable as precursors for the preparation of functional layers by means of gas-phase thin-film processes such as CVD, MO-CVD, MOVPE and ALD. Additionally, they are also suitable as catalysts for olefin hydroamination and for olefin polymerization.
Claims27
Metal complex having at least one N-aminoguanidinate ligand, wherein this metal complex is of the following formula 1a or 1b
- wherein
- M is a metal selected from the groups 1 to 15 of the Periodic Table of the Elements (PTE), lanthanides or actinides,
- R1 is hydrogen or a cyclic, linear or branched alkyl radical having up to 5 carbon atoms, NH2, NH(CH3), N(CH3)2, N(C2H5)2 or N-pyrrolidinyl, or R1 and R2 together with the nitrogen atom they are bonded to form a pyrrolidinyl ring;
- R2 is hydrogen or a cyclic, linear or branched alkyl radical having up to 5 carbon atoms, or R2 and R1 together with the nitrogen atom they are bonded to form a pyrrolidinyl ring;
- R3 is hydrogen, CH3, C2H5, NH2, NH(CH3), N(CH3)2, N(C2H5)2 N-pyrrolidinyl or a SiMe3 group,
- R4 and R5 independently of one another are hydrogen or a linear or branched alkyl radical having up to 4 carbon atoms, or R4 and R5 together with the nitrogen atom they are bonded to form a pyrrolidinyl ring;
- X is a monoanionic co-ligand selected from the hydride anion (H−), from the group of the halides, from the group of the cyclic, linear or branched alkylides having up to 8 carbon atoms, from the group of substituted or unsubstituted arylides and heteroarylides having up to 10 C atoms, from the group of alkoxylato ligands, from the group of alkylthiolato or alkylselenolato ligands or from the group of secondary amido ligands,
- Y is a dianionic coligand selected from the oxo group [O]2−, the sulfido group [S]2− or the imido group [NR6]2−, where R6 is a cyclic, branched or linear alkyl having up to 8 carbon atoms or is a substituted or unsubstituted aryl having up to 20 carbon atoms,
- L is a neutral 2-electron donor ligand,
- a is an integer between 1 and 4 and
- n, m, and p each independently of one another are 0, 1, 2, 3 or 4.
Dependencies are inferred from the claim text.