Microchannel resonator and method for manufacturing same
AssigneeIndustry-University Cooperation Foundation Sogang University
InventorsJung Chul Lee, Joo Hyun Kim
Life of this patent
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Abstract
Provided is a method for manufacturing a microchannel resonator capable of measuring a mass and characteristics of an object using a principle in which a resonance frequency is changed according to a mass of a moving material, the method including: providing a silicon substrate; forming a cavity channel inside the silicon substrate; forming a hollow silicon oxide structure on the inner wall surface of the cavity channel by oxidizing the inner wall surface of the cavity channel; and partially removing the periphery of the hollow silicon oxide structure such that the hollow silicon oxide structure can resonate with respect to the silicon substrate.
Claims14
A method for manufacturing a microchannel resonator capable of measuring a mass and characteristics of an object using a principle in which a resonance frequency is changed according to a mass of a moving material, the method comprising:
- providing a silicon substrate;
- forming a cavity channel inside the silicon substrate;
- forming a hollow silicon oxide structure on the inner wall surface of the cavity channel by oxidizing the inner wall surface of the cavity channel;
- forming a hollow polysilicon structure on the inner wall surface of the hollow silicon oxide structure;
- and
- selectively removing the periphery of the hollow polysilicon structure such that the hollow polysilicon structure resonates with respect to the silicon substrate,
- wherein a hollow microchannel structure is provided such that the moving material resonates by the remaining hollow polysilicon structure by selectively removing the periphery of the hollow polysilicon structure.
Dependencies are inferred from the claim text.