Liquid discharge apparatus, imprint apparatus, and article manufacturing method

An imprint apparatus for forming a pattern on a substrate by bringing a mold into contact with resin on the substrate, said imprint apparatus comprising:

• a liquid discharge apparatus configured to discharge the resin as a liquid on the substrate,
• said liquid discharge apparatus including:
• a container divided into a first chamber and a second chamber by a dividing member, said first chamber including a discharge outlet that discharges the liquid and configured to contain the liquid, and said second chamber configured to contain a liquid filler;
• a tank configured to store the liquid filler;
• a connecting portion that provides liquid filler communication between said tank and said second chamber;
• a measurement unit configured to measure an amount of the liquid filler supplied from said tank to said second chamber;
• and
• a controller configured to determine an amount of the liquid contained in said first chamber based on a measurement result from said measurement unit.

A method of manufacturing an article, the method comprising:

• forming a pattern on a substrate by bringing a mold into contact with resin on the substrate using an imprint apparatus;
• and
• processing the substrate on which the pattern is formed, to manufacture the article,
• said imprint apparatus including a liquid discharge apparatus configured to discharge the resin as a liquid on the substrate,
• said liquid discharge apparatus including:
• a container divided into a first chamber and a second chamber by a dividing member, said first chamber including a discharge outlet that discharges the liquid onto an object placed on a base plate and configured to contain the liquid, and said second chamber configured to contain a liquid filler;
• a tank configured to store the liquid filler;
• a connecting portion that provides liquid filler communication between said tank and said second chamber;
• a measurement unit configured to measure an amount of the liquid filler supplied from said tank to said second chamber;
• and
• a controller configured to determine an amount of the liquid contained in said first chamber based on a measurement result from said measurement unit.