Polymeric lapping materials, media and systems including polymeric lapping material, and methods of forming and using same
AssigneeJH Rhodes Company, Inc.
InventorsGeorge Wasilczyk, Brent Muncy, Scott Daskiewich
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Abstract
A polymeric material suitable for use in lapping processes, media including the polymeric material, systems including the media, and methods of forming and using the polymeric material are disclosed. The polymeric material can be used to lap hard surfaces, such as sapphire surfaces. The lapping process can be performed after a grinding process and before a polishing process.
Claims20
A lapping system comprising:
- a platen;
- a non-porous polymeric material attached to the platen, wherein a density of the non-porous polymeric material ranges from about 0.7 g/cm3 to about 3.0 g/cm3;
- and
- a slurry comprising abrasive particles.
The A method of lapping a surface of a substrate, the method comprising the steps of:
- providing a lapping system comprising a platen and a non-porous polymeric material attached to the platen, wherein the non-porous polymeric material has a density between about 0.85 g/cm3 and about 3.0 g/cm3;
- providing a substrate;
- contacting the substrate with the non-porous polymeric material;
- and
- moving the non-porous polymeric material relative to the substrate to lap the surface of the substrate.
A non-porous polymeric material for lapping a surface of a substrate, the non-porous polymeric material comprising one or more thermoset materials and having a density of about 0.7 g/cm3 to about 3.0 g/cm3.
Dependencies are inferred from the claim text.