Molecular layer deposition process for making organic or organic-inorganic polymers
AssigneeThe Regents of the University of Colorado, a body corporate
InventorsSteven M. George, Arrelaine Allen Dameron, Nicole Marie Adamczyk Keaner, Byunghoon Yoon
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Abstract
Ultrathin layers of organic polymers or organic-inorganic hybrid polymers are deposited onto a substrate using molecular layer deposition methods. The process uses vapor phase materials which contain a first functional group and react only monofunctionally at the surface to add a unit to the polymer chain. The vapor phase reactant in addition has a second functional group, which is different from the first functional group, or a blocked, masked or protected functional group, or else has a precursor to such a functional group.
Claims4
A molecular layer deposition process for forming, under appropriate reaction conditions, a layer of an organic polymer or organic-inorganic polymer onto a first hydroxyl-functionalized surface while preventing chain termination and cross-linking, comprising:
- reacting a cyclic azasilane comprising 2,2-dimethoxy-1,6-diaza-2-silacyclooctane with a surface hydroxyl on the first hydroxyl-functionalized surface;
- allowing a ring of the 2,2-dimethoxy-1,6-diaza-2-silacyclooctane to open and form a silicon-oxygen bond to the first hydroxyl-functionalized surface;
- allowing the opened ring of the 2,2-dimethoxy-1,6-diaza-2-silacyclooctane to unfold, thereby leaving a primary amine surface species;
- allowing ethylene carbonate to react with the primary amine surface species to generate a urethane linkage to the primary amine surface species, and unfold, thereby forming the layer of the organic polymer or organic-inorganic polymer having a second hydroxyl-functionalized surface.
A molecular layer deposition process for forming a layer of an organic polymer or organic-inorganic polymer onto a first hydroxyl-functionalized surface while preventing chain termination, comprising, under appropriate reaction conditions the steps of:
- allowing trimethylaluminum in the vapor phase to react with hydroxyl surface groups on the first hydroxyl-functionalized surface, thereby forming an Al—CH3 surface species;
- allowing ethanolamine in the vapor phase to react with the Al—CH3 surface species, thereby forming an Al—O—CH2CH2—NH2 surface species;
- and
- allowing maleic anhydride in the vapor phase to react with the amine, —NH2, groups on the Al—O—CH2CH2—NH2 surface species, thereby forming the layer of the organic polymer or organic-inorganic polymer having a second hydroxyl-functionalized surface.
A molecular layer deposition process for forming a layer of an organic polymer or organic-inorganic polymer onto a first hydroxyl-functionalized surface while preventing chain termination and cross-linking, comprising, under appropriate reaction conditions the steps of:
- contacting the first hydroxyl-functionalized surface with 3(1,3-dimethylbutylidene)aminopropyltriethoxysilane (PS) wherein a protecting group hides the —NH2 functionality;
- allowing the PS to form a siloxane linkage to the hydroxylated surface;
- contacting the PS surface with water;
- allowing the water to react with the imine moiety on the PS, thereby removing the protecting group, releasing 4-methyl-2-pentanone, and forming a surface terminated with primary amine groups;
- exposing the surface to an acid chloride or an acid chloride precursor, which bonds to the surface with an amide linkage, the amide linkage producing a nitrobenzyl-protected surface wherein the surface nitrobenzyl-protection group hides an underlying hydroxyl group;
- and
- exposing the surface nitrobenzyl-protection group to ultra-violet light at an appropriate wavelength and for a sufficient period of time to remove the nitrobenzyl-protection group and unmask the underlying hydroxyl group, thereby forming the layer of an organic polymer or organic-inorganic polymer having a second hydroxyl-functionalized surface.
Dependencies are inferred from the claim text.