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US 10,090,316 B2Granted
3D stacked multilayer semiconductor memory using doped select transistor channel
AssigneeASM IP Holding B.V.
InventorFumio Ootsuka
Life of this patent
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Abstract
In 3D stacked multilayer semiconductor memories including NAND and NOR flash memories, a lightly boron-doped layer is formed on top of a heavily boron-doped layer to form a select transistor, wherein the former serves as a channel of the select transistor and the latter serves as an isolation region which isolates the select transistor from a memory transistor.
Claims13
3D stacked multilayer semiconductor memory comprising:
- memory transistors constituted by heavily doped N-type semiconductor layers and lightly doped or undoped P-type semiconductor layers alternately layered with one another in a stacking direction, each layer extending in a longitudinal direction perpendicular to the stacking direction;
- and
- select transistors constituted by lightly doped P-type semiconductor layers and heavily doped P-type semiconductor layers alternately layered with one another, said select transistors being provided with gate electrodes,
- wherein the lightly doped P-type semiconductor layers of the select transistors are connected, continuously in the longitudinal direction, to one ends of the heavily doped N-type semiconductor layers of the memory transistors, respectively, and the heavily doped P-type semiconductor layers of the select transistors are connected, continuously in the longitudinal direction, to one ends of the lightly doped or undoped P-type semiconductor layers of the memory transistors, respectively, and
- wherein the lightly doped P-type semiconductor layers of the select transistor function as channels to select one of the heavily doped N-type semiconductor layers when applying voltage to the gate electrodes, and the heavily doped P-type semiconductor layers of the select transistors function as isolators to isolate the heavily doped P-type semiconductor layers from the lightly doped or undoped P-type semiconductor layers of the memory transistors.
2 more elements
Dependencies are inferred from the claim text.