Image measurement device

An image measurement device comprising:

• a stage where a workpiece is to be placed;
• a light projection section for radiating detection light on the workpiece on the stage;
• an imaging section for receiving the detection light from the workpiece, and for generating a workpiece image;
• a probe that is provided in a manner capable of being arranged in an imaging field of view of the imaging section;
• a horizontal drive section for causing the probe to contact a side surface of the workpiece that is placed on the stage, by moving the stage and the probe relative to each other in a direction parallel to an upper surface of the stage;
• a display section for displaying, at a time of measurement setting, a model image for setting that is generated based on design data of the workpiece or image data obtained by capturing an image of the workpiece by the imaging section;
• a contact position designation section for receiving, in the model image that is displayed by the display section, designation of pieces of contact target position information indicating a plurality of contact target positions on the side surface of the workpiece where the probe should contact;
• a characteristic amount information setting section for setting characteristic amount information that is set based on the model image and that is for identifying a position and an attitude of the workpiece from the workpiece image captured by the imaging section at a time of measurement execution;
• a measurement setting information storage section for storing the pieces of contact target position information and the characteristic amount information;
• and
• a measurement control section for identifying, at the time of measurement execution, the position and the attitude of the workpiece from the workpiece image captured and obtained by the imaging section, by using the characteristic amount information stored in the measurement setting information storage section, for identifying the plurality of contact target positions on the side surface of the workpiece where the probe should contact, based on the identified position and the identified attitude of the workpiece, and for controlling the horizontal drive section so that the probe sequentially moves to the plurality of contact target positions identified.