Structure
AssigneeToto Ltd.
InventorsHiroaki Ashizawa, Masakatsu Kiyohara
Life of this patent
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Abstract
According to one embodiment, a structure includes a polycrystalline substance of yttrium oxyfluoride as a main component. The yttrium oxyfluoride has an orthorhombic crystal structure, and an average crystallite size of the polycrystalline substance is less than 100 nanometers. When taking a peak intensity detected near diffraction angle 2θ=32.0° by X-ray diffraction as γ, and taking a peak intensity detected near diffraction angle 2θ=32.8° as δ, a peak intensity ratio γ/δ is not less than 0% and not more than 150%.
Claims9
A structure including a polycrystalline substance of yttrium oxyfluoride as a main component, the yttrium oxyfluoride having an orthorhombic crystal structure, and an average crystallite size of the polycrystalline substance being less than 100 nanometers,
- when taking a peak intensity detected near diffraction angle 2θ=32.0° by X-ray diffraction as γ, and taking a peak intensity detected near diffraction angle 2θ=32.8° as δ,
- a peak intensity ratio γ/δ being not less than 0% and not more than 150%.
Dependencies are inferred from the claim text.