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AssigneeRohm and Haas Electronic Materials CMP Holdings, Inc.
InventorBrian T. Cantrell
Estimating the term…
The present invention provides an apparatus for use in mixing and dispensing a curable fluid stream (stream) into an open mold to fill the mold to make polishing pads for chemical mechanical planarization of substrates. The apparatus comprises an actuator frame on which is mounted (i) a set of two plates releasably attached to the actuator frame and adapted to cut the stream when the mold is full and to release from the actuator frame after cutting the stream, and (ii) a dispenser unit for continuous pouring of the stream into an open mold, the apparatus adapted to enable removal of the released plates from the actuator during the continuous pouring after the mold is full, e.g. by raising the actuator frame and the (ii) dispenser unit, whereby one can place a container above the mold to catch the plates.
An apparatus for use in mixing and dispensing a curable fluid stream into an open mold to fill the mold to make polishing pads for chemical mechanical planarization of substrates comprising an actuator frame on which is mounted (i) a set of two plates releasably attached to the actuator frame and adapted to cut the curable fluid stream when the mold is full and to release from the actuator frame after cutting the curable fluid stream, wherein the actuator frame has mounted on it a set of two arms for controlling the movement of the (i) set of two plates, the plates being a catch plate releasably attached to a catch arm and a sling plate releasably attached to a sling arm and (ii) a dispenser unit for continuous pouring of the curable fluid stream into an open mold, the apparatus is adapted to enable removal of the released plates from the actuator during the continuous pouring and after the mold is full.
Dependencies are inferred from the claim text.