Apparatus and method for microparticle separation based on microfluidic chromatography using surface acoustic wave

An apparatus for separating nano scale particles based on microfluidic chromatography using surface acoustic waves, comprising:

• a piezoelectric substrate;
• a pair of transducers, which are patterned on the piezoelectric substrate and generate surface acoustic waves when electric energy is applied to the piezoelectric substrate;
• a microfluidic chip, which is mounted on the piezoelectric substrate and include a microfluidic channel disposed between the pair of transducers, wherein a fluid including nano scale particles flows in the microfluidic channel;
• and
• a detection unit, which detects nano scale particles separated by the surface acoustic waves while the nano scale particles pass through the microfluidic channel,
• wherein forces of the surface acoustic waves generated by the pair of transducers are formed in a direction opposite to a fluid flow to generate flow resistance to the nano scale particles which flows in the microfluidic channel;
• wherein the microfluidic channel has at least one bending portion;
• wherein surface acoustic waves generated by the pair of transducers meet each other to form standing surface acoustic waves, and thus a plurality of pressure nodes are periodically formed in a flow direction of the fluid;
• wherein an end portion of the microfluidic channel is provided with a fluid outlet;
• wherein the detection unit is installed before the fluid outlet in a flow direction of the fluid;
• wherein the microfluidic channel is configured such that a flow along the microfluidic channel perpendicularly passes through a plurality of pressure node lines which are arranged in the flow direction.