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US 10,082,425 B2Granted
Integrated chromatic confocal sensor
AssigneeUnity Semiconductor Corporation
InventorPhilippe Gastaldo
Life of this patent
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Abstract
A confocal chromatic device is provided, including at least one chromatic lens with an extended axial chromatism; at least one broadband light source; at least one optical detector; and at least one measurement channel with a planar Y-junction made with a planar waveguide optics technology, and arranged for transferring light from the at least one light source towards the at least one chromatic lens and for transferring light reflected back through the at least one chromatic lens towards the at least one optical detector.
Claims12
A confocal chromatic device, comprising:
- a chromatic lens assembly with an extended axial chromatism;
- at least one broadband light source;
- at least one optical detection means;
- a plurality of measurement channels each comprising a planar Y-junction made with a planar waveguide optics technology, and arranged for transferring illumination light from said at least one light source towards said chromatic lens assembly and an object, and for transferring measurement light reflected back by said object on a measurement point through said chromatic lens assembly towards said at least one optical detection means,
- said planar Y-junction comprising a first waveguide which is enlarged progressively in a tapered zone ending in two branching waveguides, said planar Y-junction being achromatic at least over a spectral range of interest of said light source;
- and
- an integrated optics component holding the planar Y-junctions and the waveguides of said measurement channels, wherein said measurement channels each comprise a collection aperture from which said illumination light is issued and which collects the measurement light in a confocal configuration with said collection aperture being conjugate of the measurement point for the chromatic lens assembly, said collection apertures being directly at ends of the waveguides at an edge of the integrated optics component, and facing the chromatic lens assembly so that the spatial repartition of said collection apertures determines a spatial repartition of the measurement points on the object.
4 more elements
Dependencies are inferred from the claim text.