Method for producing at least one deformable membrane micropump and deformable membrane micropump

A method for producing at least one deformable membrane micropump including a first substrate and a separate second substrate that are assembled together, the first substrate including at least one cavity and the second substrate including at least one deformable membrane arranged facing the cavity, the first and second substrates defining a portion of a microchannel together wherein the cavity and the deformable membrane are situated, the method comprising:

• producing the cavity in the first substrate;
• producing a conduit in the cavity, the conduit being surrounded by an annular lip;
• producing an undercut in the second substrate on a bottom face of the second substrate that faces the first substrate, the undercut aligning with the conduit;
• subsequent to producing the cavity, the conduit, and the undercut, assembling together the first and second substrates to define the portion of the microchannel, the portion of the microchannel being enclosed by the first and second substrates;
• and
• producing the deformable membrane on the second substrate after the first and second substrates are assembled together,
• wherein the second substrate includes a layer of silicon dioxide sandwiched between two layers of silicon, and the second substrate is continuous over an entire length of the first substrate.