Directional microphone and associated packing techniques

A device, comprising:

• an acoustic sensor having
• a sensing diaphragm configured to sense sound pressure,
• a cavity below the sensing diaphragm, and
• a first substrate:
• a channel with an inlet open at an edge of the first substrate and an outlet connected with the cavity;
• a housing enclosing the acoustic sensor, the housing having a cover attached to a second substrate supporting the first substrate;
• and
• multiple channels each having an inlet open at the edge of the first substrate and an outlet connected with the cavity, wherein
• the cover includes a first opening over the sensing diaphragm, and a second opening at a side of the cover, the second opening being disposed adjacent to the inlet of the channel,
• the cover includes multiple second openings at sides of the cover, and
• each of the multiple second openings is positioned adjacent to respective inlets of the multiple channels.

A device of, comprising:

• an acoustic sensor having
• a sensing diaphragm configured to sense sound pressure,
• a cavity below the sensing diaphragm, and
• a first substrate;
• a channel with an inlet open at an edge of the first substrate and an outlet connected with the cavity;
• a housing enclosing the acoustic sensor, the housing having a cover attached to a second substrate supporting the first substrate;
• and
• an anechoic chip disposed over the cover and configured to absorb sound waves, wherein
• the cover includes a first opening over the sensing diaphragm, and a second opening at a side of the cover, the second opening being disposed adjacent to the inlet of the channel.