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US 10,079,141 B2Granted
Ultraviolet light-generating target and method for manufacturing the same, and electron beam-excited ultraviolet light source
AssigneeHamamatsu Photonics K.K.
InventorsKohei Ikeda, Norio Ichikawa
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Abstract
An ultraviolet light-generating target comprising a substrate transmitting ultraviolet light; and a light-emitting layer provided on the substrate and emitting ultraviolet light in response to an electron beam, wherein the light-emitting layer is an amorphous layer formed of Al2O3 doped with Sc.
Claims9
An ultraviolet light-generating target comprising:
- a substrate transmitting ultraviolet light;
- and
- a light-emitting layer provided on the substrate and emitting ultraviolet light in response to an electron beam,
- wherein the light-emitting layer is an amorphous layer formed of Al2O3 doped with Sc.
1 more element
A method for manufacturing an ultraviolet light-generating target, comprising:
- vapor-depositing Al2O3 doped with Sc on a substrate transmitting ultraviolet light, to form an amorphous layer;
- and
- firing the amorphous layer.
Dependencies are inferred from the claim text.