US 10,069,281 B2 · Laser diode and method of manufacturing laser diode

Abstract

A laser diode includes a ridge portion, channel portions located adjacent to the ridge portion such that the ridge portion is sandwiched, the channel portions being shorter in height than the ridge portion, terrace portions adjacent to opposite sides of the respective channel portions from the ridge portion and longer in height than the channel portions, supporting portions provided over the respective channel portions, separated from side surfaces of the ridge portion or side surfaces of terrace portions or both, and made of resin, a ceiling portion including first portions provided over the supporting portions and second portions continuous with the first portions and located over the respective channel portions with hollow portions interposed therebetween, the ceiling portion being made of resin, and a metal layer provided over the ceiling portion and connected to an upper surface of the ridge portion.

Claims5

Dependent claims

A method of manufacturing a laser diode, comprising the steps of:

forming resin in portions of channel portions of a laser structure to form hollow portions sealed with the laser structure and the resin, the laser structure including a ridge portion raised in a stripe shape, the channel portions having the ridge portion sandwiched therebetween and being shorter in height than the ridge portion, and terrace portions adjacent to opposite sides of the respective channel portion from the ridge portion and longer in height than the channel portions;
forming a metal layer contacting an upper surface of the ridge portion over the resin;
and
patterning the metal layer using resist.

1 more element

Dependencies are inferred from the claim text.

Laser diode and method of manufacturing laser diode

Life of this patent

Laser diode and method of manufacturing laser diode

Life of this patent

Abstract

Claims5