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US 10,067,078 B1Granted
Transmission electron microscope sample alignment system and method
AssigneeKing Abdullah University of Science and Technology
InventorsDaliang Zhang, Yu Han, Kun Li, Yihan Zhu
Life of this patent
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Abstract
A system and method involve applying an electron beam to a sample and obtaining an image of the sample with the applied electron beam. An orientation of the sample relative to the sample's zone axis is automatically determined based on a distribution of reflections in the image. The orientation of the sample is automatically adjusted to align with the sample's zone axis based on the determined orientation.
Claims20
A method, comprising:
- applying an electron beam to a sample;
- obtaining an image of the sample with the applied electron beam;
- automatically determining an orientation of the sample relative to the sample's zone axis based on a distribution of reflections in the image;
- and
- automatically adjusting the orientation of the sample to align with the sample's zone axis based on the determined orientation.
2 more elements
A system, comprising:
- an electron gun;
- a sample holder;
- an imaging detector;
- a positioning controller coupled to the sample holder and configured to adjust an orientation of a sample in the sample holder;
- and
- a processor communicatively coupled to the electron gun, the sample holder, the imaging detector, and the positioning controller,
- wherein the processor executes instructions to control the sample holder based on an automatically calculated Laue circle of the imaged sample.
4 more elements
A method, comprising:
- automatically determining an orientation of a sample relative to the sample's zone axis based on a distribution of reflections in an image of the sample;
- automatically adjusting the orientation of the sample to align with the sample's zone axis based on the determined orientation;
- calculating an amplitude filtered pattern in a Fourier domain based on amplitude components of a plurality of Fourier transformed images of a sequence of images;
- replacing an amplitude component of the plurality of Fourier transformed images with the amplitude pattern to form a plurality of filtered Fourier transformed images;
- determining image shift information based on the plurality of filtered Fourier transformed images;
- and
- applying the image shift information to images in the sequence of images to form a plurality of aligned images.
4 more elements
Dependencies are inferred from the claim text.