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US 10,067,022 B2Granted
Absolute pressure sensor
AssigneeDENSO International America, Inc.
InventorsKazuhisa Nakagawa, Brett Thomas
Life of this patent
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Abstract
An absolute pressure sensor assembly configured to generate a pressure output representing pressure of a target media modified to take into account pressure loss of a sensor cavity of the absolute pressure sensor.
Claims9
An absolute pressure sensor assembly comprising:
- a first diaphragm between a sensor cavity sealed under vacuum and a pressure media to be measured;
- a first strain gauge of the first diaphragm configured to measure pressure of the pressure media relative to pressure of the sensor cavity;
- a second diaphragm between an error cavity sealed under vacuum and an error counter-cavity sealed under vacuum;
- and
- a second strain gauge of the second diaphragm configured to measure pressure of the error counter-cavity relative to the error cavity to identify a pressure error of the absolute pressure sensor assembly;
- wherein the absolute pressure sensor assembly is configured to generate a pressure output that includes the pressure of the pressure media as measured by the first strain gauge modified by the pressure error measured by the second strain gauge.
3 more elements
Dependencies are inferred from the claim text.