Embedded thin films
AssigneeThe Research Foundation for The State University of New York
InventorsJunghyun Cho, Bahgat Sammakia, Mark D. Poliks, Roy Magnuson, Biplab Kumar Roy
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AssigneeThe Research Foundation for The State University of New York
InventorsJunghyun Cho, Bahgat Sammakia, Mark D. Poliks, Roy Magnuson, Biplab Kumar Roy
Estimating the term…
A method for forming a film on a conductive substrate, comprising immersing a substrate having a conductive portion in a solution comprising a metal ion ceramic precursor for the film and a peroxide; applying a voltage potential to the conductive portion with respect to a counter electrode in the solution, sufficient to protect the conductive portion from corrosion by the solution, and drive formation of a film on the substrate, controlling a pH of the solution while limiting a production of hydrogen by electrolysis of the solution proximate to the conductive portion; and maintaining the voltage potential for a sufficient duration to produce a film on the conductive portion. An electrode may be formed over the film to produce an electrical device. The film may be, for example, insulating, dielectric, resistive, semiconductive, magnetic, or ferromagnetic.
A ceramic film electronic device, comprising:
A substrate having metallic surface with a ceramic film thereon, formed by a process comprising the steps of:
A substrate having a substantially adherent and non-chemically corroded patterned layer of metal film, and on selected portions of the patterned layer of metal film, an electrochemically-formed ceramic film comprises self-attractive ceramic nanoparticles providing at least one of a resistive, capacitive, semiconductive, and environmentally-responsive electrical properties.
Dependencies are inferred from the claim text.