Inductive sensor comprising integrated soft magnetic layer and method for the production thereof
AssigneeMicro-Epsilon Messtechnik GmbH & Co. KG
InventorsChristian Pfaffinger, Werner Groemmer, Karl Wisspeintner, Guenter Schallmoser, Thomas Wisspeintner
Life of this patent
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Abstract
The invention relates to a sensor element for an inductive sensor used for a displacement or distance measurement by means of a magnetic field that varies according to the distance from the measurement object but that remains temporally constant. In said sensor, thin ferromagnetic material is integrated into a substrate. The invention also relates to a sensor comprising said sensor element and to a method for producing the sensor element.
Claims22
Sensor element for an inductive sensor for at least one path or distance measurement using a magnetic field that changes according to the distance to the measuring object but is constant over a period of time, whereby thin ferromagnetic material is integrated into a substrate, whereby the sensor element features a plane coil, a soft-magnetic foil that covers at least one side of the plane coil, and a conductive foil that covers at least one side of the soft-magnetic foil,
- wherein:
- the substrate is a circuit board, a plate, or a ceramic substrate,
- the plane coil is integrated into the circuit board, the plate, or the ceramic substrate,
- the soft-magnetic foil, which covers the plane coil, is integrated into the circuit board, the plate, or the ceramic substrate, and
- the soft-magnetic foil is positioned intermediate the plane coil and the conductive foil.
Process for manufacturing a multi-layered sensor element, said process comprising the steps of defining a layer structure by:
- integrating at least one coil layer and one or more insulation layers into a substrate that is one of a circuit board, a plate, or a ceramic substrate;
- covering at least one side of the coil layer with a ferromagnetic foil by positioning the ferromagnetic foil adjacent the at least one side of the substrate;
- applying a further insulation layer to at least one side of the ferromagnetic foil, such that the ferromagnetic foil is intermediate the further insulation layer and the coil layer;
- and
- covering at least one side of the ferromagnetic foil with a conductive foil, such that the ferromagnetic foil and the further insulation layer are positioned intermediate the coil layer and the conductive foil.
Dependencies are inferred from the claim text.